Used NIKON NSR 2005 i10C #9283324 for sale
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ID: 9283324
Wafer Size: 4"
Vintage: 2012
Stepper, 4"
Main body
Controller rack
AC Unit
NA Variable system
Maximum NA: 0.57
Reticle size: 6"
(20) Reticle microscopes
Wafer chuck: 6"
Wafer chuck type: Ring
(6) Pre-alignment 2: Flat
(6) Pre-alignment 2 hammers
Wafer loader: Type 1
Chip leveling
Wafer carrier table: Left / Right
Alignment sensor: LSA
No in-line
No on-line
No in-line interface
No wafer alignment assist microscope
No wafer edge exposure
No signal tower
No power meter / Test reticles
No reticle cases
No remote controller
2012 vintage.
NIKON NSR 2005 i10C is a state-of-the-art wafer stepper designed for use in the production of semiconductor devices. This variable spot size projection exposure equipment features a proven 72-channel illumination system and a high-speed crystal quartz refractive lens unit. It is capable of achieving exceptional imaging and overlay accuracies, and can easily handle single to 6-inch wafers. NIKON NSR 2005I10C is designed with a high-speed and highly precise XY motor stage. This motor stage enables fast and precise positioning of the wafer and provides high-precise alignment and ultra-Fine scanning control. The optics of the machine are based on a refractive quartz crystal lens that allows high intensity and fast imaging speeds with no chromatic aberration. NSR-2005I10C is equipped with a 72-channel TTL illumination tool that provides uniform illumination and superior noise immunity. This asset allows the use of advanced optics with multi-wavelength illuminating light to fine tune the exposure process. The model is also equipped with a high-speed wafer indexing mechanism enabling the precise unexposed wafer transfer. This in combination with a high-speed wafer handler allows for fast processing of even large wafers with a high yield rate. The equipment is automated with high performance and user friendly CoolViewer operation software, which enables quick and accurate operation that can drastically reduce the total operation time. This system also features automatic or manual alignment modes, and auto target focusing with an accuracy of 1nm. NIKON NSR-2005 I 10 C wafer stepper is the perfect choice for wafer processing with a high degree of accuracy, ease of operation and automation. This unit offers superior imaging quality and precision, making it highly suitable for demanding microchip production needs.
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