Used NIKON NSR 2005 i11D #293813221 for sale
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ID: 293813221
Wafer Size: 6"
Vintage: 1996
i-line stepper, 6"
VAX Station control system
Operation Panel (OPD)
Reticle Loader (RL)
Wafer Loader (WL)
Environment chamber
Lens Controller (LC)
Alternating Current (AC) power distribution system
Electricity box
Link to wafer track from left side
1996 vintage.
NIKON NSR 2005 i11D is a state-of-the-art wafer stepper designed to quickly and accurately produce photomasks for semiconductor production. The advanced wafer stepper features a very large stage with a travel distance of 800 x 900 mm. It is equipped with two independently controlled stages for double-sided alignment and improved accuracy. With multiple metrology and alignment options, NIKON NSR-2005I11D can precisely and exactly reproduce patterns from even the most complex mask designs. The advanced laser and optics systems of NSR 2005 I 11 D are perfect for high-precision applications. The step and repeat lithography equipment uses a state-of-the-art ultra-stable optical platform while a wide variety of illumination mode options makes it very adaptable to different wafer sizes. The laser-based mechanisms have been designed and optimized for top performance, providing a resolution up to 0.3 microns with highly accurate placement accuracy. Furthermore, NIKON NSR 2005 I 11 D features an innovative AutoAligner, perfect for maintaining the highest accuracy and alignment during production of multiple layers. The system also supports very large fields of view with a maximum field of 28mm x 28mm and a minimum field of 3mm x 3mm. The image sensor has high sensitivity, making it the perfect choice for low-k1 applications. The advanced control unit of NSR-2005I11D further optimizes lithography performance. It comes with a total of four individual dose controllers that can be used to adjust the exposure dose to each pattern individually. Additionally, the machine supports a wide choice of exposure filters and auto-adjustment of the dose tool for easy optimization of lithography needs. Its advanced design makes it a perfect asset for high-efficiency photolithography. NSR 2005 i11D is an ideal solution for a range of industries requiring high-precision, high-yield photomasking solutions. With its advanced design, reliable operation and easily adjustable exposure settings, it is the perfect choice for a range of complex, low-k1 photomask applications.
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