Used NIKON NSR 2005 i12D #293817940 for sale
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ID: 293817940
i-Line stepper
Numerical Aperture (NA): 0.5-0.63
Resolution: 350 nm
DCO: 60
MMO: 70
Throughput (WPH): 70.
NIKON NSR 2005 i12D (Metrology Stepper) is an advanced wafer stepper designed for high-precision metrology and wafer fabrication. The stepper has a wide range of features and capabilities that make it an ideal choice for both research and production applications. NSR 2005 i12D has a 12-inch scan field, which provides a larger exposure area than most other steppers available. This stepper has a high resolution, up to 0.65 microns, and is capable of processing up to twelve different image patterns in succession. It includes a low-vibration, high-dynamic alignment system, which ensures relative accuracy during exposure. NIKON NSR 2005 i12D has a high-speed stage design that enables high-precision alignment and fine movement control. It also has an advanced wafer-analog imaging system that allows for high-precision control and exposure. NSR 2005 i12D also offers a reliable and efficient exposure process, which is important for production applications. The high speed of NIKON NSR 2005 i12D combined with the low noise level ensures a quick and steady response to corrections, so exposure time can be optimized and controlled. For metrology applications, NSR 2005 i12D is capable of providing the absolute accuracy required for measuring and monitoring the process parameters that are vital for a successful manufacturing process. The stepper has an integrated high-precision stepper motor and laser interferometer as well, which provide measurements and highly repeatable parameters for every exposure. In addition, NIKON NSR 2005 i12D features advanced features such as an ultra-long exposure range, high-level particle detection, optimized substrate detection, and an advanced camera interface for inspections and measurements. It can continuously monitor the substrate's surface to obtain the highest accuracy and repeatability. NSR 2005 i12D includes an integrated image processing system that allows users to monitor the exposure process with real-time feedback. Overall, NIKON NSR 2005 i12D is a powerful and reliable wafer stepper designed for high-precision metrology and wafer fabrication. Its wide range of features and capabilities, combined with its high speed, low noise, and high accuracy, make it an ideal choice for both research and production applications.
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