Used NIKON NSR 2005 i12D #293831217 for sale

NIKON NSR 2005 i12D is a scanning wafer stepper that provides advanced high resolution imaging capabilities for semiconductor device fabrication. It has an automated alignment equipment with up to eight built-in stages for multi-exposure and wafer-level alignment. The i12D boasts state-of-the-art auto-focusing and auto-centering systems, and its large depth of focus ensures excellent image consistency across a wide range of substrates. NSR 2005 i12D features a maximum resolution of 12nm, a full-field image size of 22mm x 27mm, a maximum wafer size of 8" (200mm), a maximum scan area of 24mm x 24mm and a minimum step size of 5um. The system is designed for use with soft x-ray, mid-UV, and conventional optics up to 10x. Additionally, the stepper supports a range of quartenary, binary, and octal lenses that allow users to optimize image resolution and detect small features even at high magnifications. NIKON NSR 2005 i12D has a comprehensive control unit. It includes an external interface and integrated software for controlling and monitoring the machine's features and operations. The user can adjust the stepper's maintenance operations, such as monitor wafer form and position, exposure, background, and leveling. Users can even customize the scan start area and reset the scanning cycle. The stepper also features robust wafer handling for increased stability and repeatability. The tool's wafer holder is designed to secure the wafer using multiple piezo-electric elements, and the interference-free double-rail asset ensures perfectly flat wafer surfaces. It is also designed with a vibration- minimization model that reduces stage settling time and provides a vibration-free scan environment. Overall, NSR 2005 i12D is a versatile wafer stepper equipment designed for high precision imaging and fabrication. Its advanced features and robust wafer handling capabilities allow users to produce excellent imaging results for various levels of production.