Used NIKON NSR 2005 i6 #9269102 for sale

NIKON NSR 2005 i6
Manufacturer
NIKON
Model
NSR 2005 i6
ID: 9269102
Wafer Size: 3"-5"
Steppers, 3"-5".
NIKON NSR 2005 i6 is a Wafer Stepper that offers high resolution imaging for a variety of applications. It provides a wide range of exposure parameters for flexible processing and is designed to provide reliable operation and high yields for an array of masks and circuit patterns. The machine is a 5-axis equipment with a unique design allowing for visibility from the front, side, and top of the chamber. It is equipped with an automated alignment system to ensure precise alignment of the reticle and wafer during exposure. NSR 2005 i6 utilizes a Perfect Step Stepping Method that enables extremely precise image placement of even the most complex features. This technology allows for ~0.5 nm resolution with minimal registration error, and the exposure parameters can be further optimized to obtain a higher degree of precision. The infrared Alignment Unit is also capable of providing accurate overlay alignment of various circuit patterns, and the machine's 3D alignment compensates for any tilt errors between wafer and reticle - enabling imaging of extremely small features. NIKON NSR 2005 i6 has a self-regulating Full Closed Loop Scanning Tool to ensure the resolution of even the most challenging photomasks. This asset enables efficient registration accuracy and minimizes defect impacts during production. The tool is also equipped with a built-in Image Evaluation Model to ensure a quality image is produced during each exposure. NSR 2005 i6 utilizes integrated Carrier and Wafer Handlers for increased throughput and efficiency. The integrated air-bearing type handlers offer precise handling and optimal surface protection. The equipment is also equipped with a Low Bump Resistance Unit to reduce adhesion of particles and optimize the printing of pattern edges. This technology aids in controlling within-die variation and combined with the comprehensive image evaluation produces consistently high yields. NIKON NSR 2005 i6 comes equipped with a variety of features such as reliability monitoring and supportive sub systems, such as the Reflow Oven and particle monitoring system, that can help with ongoing maintenance. The tool is also equipped with Ethernet connectivity providing easy access and communication with other nodes in the network. This allows for easy tracking of tool status and further support during process optimization.
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