Used NIKON NSR 2005 i8A #293689926 for sale
URL successfully copied!
Tap to zoom
ID: 293689926
Wafer Size: 6"
Vintage: 1991
Stepper, 6"
Wafer stage: Ball screw style
(2) Wafer loader indexers
Wafer loader type: KEYENCE and OMRON sensors for clear wafers
Wafer loader pre-alignment 2
Wafer type: Flat
Illuminator type: 1500 W
Reticle libraries
Reticle load / Unload arms: Open / Close (20 mm)
Ceramic ring chuck with pre-alignment
Focus calibrate
TTL Reticle alignment
Resolution: 0.5 micron
Computer type: PDP11
Reticle size: 5"
Barcode reader
Autofocus: Single point
Movable microscopes: 15/17.5/20 mm
LLTC: Standard air
LIA
FIA
LSA
Chip levelling
ISS
SEC2
No PPD
1991 vintage.
NIKON NSR 2005 i8A is a highly accurate and reliable full-field wafer stepper. This equipment provides an advanced platform that achieves high throughput production of precision substrates, with superior pattern recognition results and low overall throughput time. The resolution of NIKON NSR 2005I8A is centered around a highly advanced, 0.4 μm resolution, scan based illumination system, utilizing a 32-step vertical field of view. The stepper also features a Multi-Directional Pattern Recognition unit, allowing it to rapidly detect and place substrates of any shape. NSR-2005I8A is equipped with a full 5-axis capability, including 3 rotary axes, two X-Y translation axes, and a Z-axis. This setup allows for the most accurate positioning and alignment of stepper components and substrates. Additionally, NIKON NSR-2005I8A utilizes a high-precision optical platform, a direct drive motor machine, and high throughput FEM-based alignment algorithm. This advanced tool allows for superior pattern recognition results and fast throughput time, allowing it to efficiently process complex substrates. Additionally, NIKON NSR-2005 I8A is also equipped with a variety of features that provide greater user control. These features include a multi-tool feature that gives operators the ability to rapidly switch between different optics on the fly. Additionally, NIKON NSR 2005 I 8 A includes a unique geometrical feature called the Defocus Offset Asset, which is designed to help reduce optical imaging problems caused by defocus errors. Finally, NSR 2005I8A also has a comprehensive model of integration tools. This equipment makes it easy to connect the stepper to a variety of other components and programs. These integration tools provide a single window to the stepper, allowing operators to utilize a wide range of software and hardware engineering applications. In conclusion, NSR-2005 I8A is a highly advanced and feature-packed wafer stepper. The system is equipped with a 0.4 μm resolution scan-based illumination unit, a rotary 5-axis design, sophisticated integrated optics and motor systems, and a robust suite of integration tools. Together, these features allow for fast throughput time and the accurate placement of any shape substrates with the highest precision and accuracy.
There are no reviews yet