Used NIKON NSR 2005 i9C #9096013 for sale

NIKON NSR 2005 i9C
Manufacturer
NIKON
Model
NSR 2005 i9C
ID: 9096013
Wafer Size: 6"
Vintage: 1993
i-Line stepper, 6", 1993 vintage.
NIKON NSR 2005 i9C is a wafer stepper designed for high precision photolithography applications. The wafer stepper uses advanced technology to accurately create high-resolution images on wafers or substrates. NIKON NSR2005I9C is capable of performing multiple functions in a single shot, including exposure, alignment, and bake. With its high-speed imaging capability and patented "vacuum" imaging heads, the i9C can accurately produce sub-micron resolution patterns in a precise, repeatable manner. The i9C is composed of three main components: the imaging head, the illumination equipment, and the movable beam delivery mechanism. The imaging head contains an array of fine-tuneable lenses to provide precise submicron resolution over a wide field of view. The illumination system contains lenses, dichroic filters, and other optics to provide a uniform, low-distortion illumination to the sample. Finally, the beam delivery mechanism utilizes precise motor controls to quickly move the imaging head from one region of the wafer to the next. The unit is capable of providing submicron resolution over an area of 500mm by 10mm. The wafer size can be easily changed to accommodate various process requirements, limited only by the size of the imaging head. The stepper is designed to work with various resist mask levels, and can accommodate a wide range of wavelengths (193nm to 248nm). Furthermore, the i9C is capable of patterning three-dimensional structures with a selective deposition mechanism. NSR-2005I9C offers numerous options and features that reduce complexity and increase performance. Unique to this wafer stepper is an internal image processing machine, which dramatically reduces setup/adjustment time. The advanced motion control tool, in combination with a high-speed imaging area-detector, ensures accurate registration and repeatable CD results. An optional Vacuum Clamp Fixture automates placement, centering, and alignment, allowing for faster processing and improved throughput. NSR2005I9C is a reliable, highly-accurate wafer stepper. Its ability to accurately produce sub-micron resolution patterns with high uniformity, repeatability, and throughput makes it an ideal solution for wafer production. With its intuitive Interface and multiple advanced features, it can make complex lithography tasks simpler, faster, and more precise.
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