Used NIKON NSR 2005 i9C #9242188 for sale

NIKON NSR 2005 i9C is a full-field, high-precision wafer stepper designed to improve yield and reduce manufacturing costs of semiconductor devices. This machine is the model succeeding the NSR-2005i8C, and offers improved performance and efficiency through enhanced optical and processing components. NIKON NSR2005I9C is designed to operate with a 1:00 gamma coated lens stepper, which reduces flare and ghost occurrence, as compared to other non 1:00 lenses. Because of this, the stepper is able to produce high-one-pitch patterns with ultrasharp imaging quality. The machine features an improved wafer alignment equipment (WASL) which enables high throughput and assures precise alignment, to increase process reproducibility and reduce lot failure. The WASL system measures alignment errors on the wafer periphery, allowing for a reduction in focus shift along the full field. The i9C likewise has a variable resolution capability which enables it to reproduce precise pattern sizes, with the ability to switch between 4X (1-micron resolution) and 10X (0.25-micron resolution) resolution at the wafer level. This ensures pattern geometry is maintained correctly and increases wafer size reach. NSR-2005I9C features an integrated dynamic focus unit, which compensates focus shift on long field and high magnification steps, as well as focus overshoots, to ensure high profile accuracy and high-pitch pattern capability. Dynamic focus also reduces thermal and micro-oven effect, since the focus position is actively monitored and adjusted on each global step. The i9C also offers an improved illumination machine that delivers typically 2µm linewidth patterns with conventional dry etch resist, and a powerful and flexible compression from 1X Binarized Pixel Distribution (BPD). The improved illumination tool also showcases a near-field effect reduction that delivers better pattern contrast. NIKON NSR 2005I9C also has mechanical and environmental stability that helps to reduce unexpected failures, defects and loss of yield in production. Process control and analysis software suites on the machine ensure optimal utilization of the i9C's capabilities, while providing real-time information to operators. Overall, NIKON NSR-2005I9C is a precision wafer stepper designed with advanced imaging optics and sophisticated process control which offers improved yields and cost-efficiency in semiconductor manufacturing.