Used NIKON NSR 202A #9210121 for sale
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ID: 9210121
Stepper
Specifications:
Resolution: ≦ 250 nm
NA: 0.60
Exposure light source: KrF excimer laser (248 nm wavelength)
Reduction ratio: 1:4
Exposure field: 25 × 33 (mm)
Alignment accuracy (EGA, |M| + 3σ): ≦ 45 nm.
NIKON NSR 202A is a fully automated wafer stepper designed for high precision and reliable semiconductor wafer processing. It is a next generation wafer stepper featuring a modular design that is compact, enabling maximum workflow efficiency. NSR 202A has a vision equipment that is capable of processing large wafers efficiently and accurately. It utilizes a high-precision high-resolution 2K CCD lens array that can detect the individual patterns and features on each wafer. The stepper also utilizes an advanced optical system that ensures unparalleled accuracy and speed for exposing wafers. NIKON NSR 202A has an innovative lens unit that enables the machine to image wafers at different magnifications. This machine also allows for maximum flexibility in setup and alignment, enabling the machine to accommodate variations in the chip layout of different wafers. The machine also has an auto-focus mechanism that provides repeatable wafer positioning and enhanced accuracy. This tool ensures consistent chip patterning and exposure each time. NSR 202A has an integrated exposure control asset that allows for precise exposure control of your process. This model provides a stable working environment and allows for advanced patterning techniques for a wide range of applications. The machine utilizes a modular design and a high-speed processor for industry-leading performance. It features a unique single-room design that helps reduce equipment costs, while providing a safe working environment. In addition, NIKON NSR 202A utilizes an advanced software architecture that enables a wide range of applications to be readily programmed and controlled. Its easy-to-use graphical operator interface allows for efficient and intuitive setup and operation. NSR 202A is an industry-leading wafer stepper designed to get the most out of your semi-conductor manufacturing process. Its advanced features and precision optics provide a powerful and efficient way to produce high precision wafers. With its modular design and integrated exposure control equipment, NIKON NSR 202A is an ideal tool for any wafer processing application.
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