Used NIKON NSR 204B #293628542 for sale

NIKON NSR 204B is a wafer stepper manufactured by NIKON Corporation, which is used in semiconductor industry. It has a 4-inch wafer stepper with wafer sizes of 3 inch, 4 inch, and 6-inch. NIKON NSR-204B is designed for semiconductor production processes, such as etching, lithography, inspection, and scanning. NSR 204B is equipped with a 20-millimeter circular scan lens that allows exposure of the photoresist film over the entire surface of the wafer. NSR-204B has a dynamic accuracy of 60 nanometers and an exposure time is fast exposure of only one second. It features a double-eddy-current drive equipment, which reduces scanning vibration and provides a high response to fast scan speeds and moves. NIKON NSR 204B is designed for high repeatability, with a maximum blur zone of 2 microns. It has a pattern accuracy of 6 microns, featuring a flat surface to ensure high accuracy of pattern exposure. NIKON NSR-204B also has a high efficiency anti-reflection coating to minimize reflectance and minimize exposure loss due to interference. NSR 204B is equipped with a motorized slit scanning system that provides high accuracy and stability for slit scanning exposure. The cutting exposure accuracy is kept constant, irrespective of the type of pattern formed by overlapping the blank wafer and the cutting exposure wafer. The slit scanning speed is 1 micron per second, while the cutting exposure speed is 5 microns per second. NSR-204B is controlled with an NCU 2000 CNC data interface unit, which is capable of controlling its exposure process, wafer motions, speed, and positioning. It has a self-checking machine which can identify potential tool irregularities while monitoring the scan lens position and speed, exposure parameter settings, and asset performance. NIKON NSR 204B is designed for easy maintenance and can be quickly replaced. All parts are designed for easy inspection and maintenance. NIKON NSR-204B also has a safety feature that prevents wafer exposure when the power is cut unexpectedly. It also has an auto-calibration feature for the exposure accuracy and for ultrasonic cleaning of the wafers.