Used NIKON NSR 2205 EX14 #9243870 for sale

NIKON NSR 2205 EX14
Manufacturer
NIKON
Model
NSR 2205 EX14
ID: 9243870
Vintage: 2001
Stepper 2001 vintage.
NIKON NSR 2205 EX14 is a wafer stepper designed to meet the high-precision positioning requirements of photolithography fabrication processes in the semiconductor industry. It is capable of producing lithographic patterns on semiconductor wafers with unparalleled accuracy and speed. NIKON NSR-2205 EX14 is based on NIKON refined optical projection structure, which uses an excellent NIKON objective lens and a stage whose motion range is flat within 5 μm. The quick-change alignment system makes it possible to quickly switch between 4-inch and 6-inch wafers, and the front-open design ensures easy loading and effective alignment are achieved in a short time. NSR-2205 EX 14 has an automated pattern recognition program which allows for the automatic tracking and correction of patterned defects. In addition, it uses an advanced digital signal processing system to ensure accuracy and reduce the time it takes to complete a lithography process. NIKON NSR 2205 EX 14 is equipped with a high-precision 8-axis stage and a fast focus alignment capability. This provides high-precision patterning with optimal focus across a wide range of substrate sizes and techniques. Further, a unique injection-lock-and-lens system offers low off-axis locking forces for accurate and stable positioning over extended periods. Additionally, NSR-2205 EX14 is equipped with a multi-stage mapping program which can quickly identify wafer pattern misalignment and correct it rapidly. This allows for tighter process control of critical pattern characterizations, such as line edge and line width roughness. Finally, NSR 2205 EX 14 features a complete suite of control tools, making it easy to integrate into existing fabrication lines. It is also capable of accommodating third-party software such as APC and AutoPC, allowing for optimized patterning control and programmable process automation.
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