Used NIKON NSR 2205 EX14C #9192103 for sale

NIKON NSR 2205 EX14C is a 5-inch stepping projection aligner that can be used for a wide variety of microfabrication applications. It is designed to accurately and repeatably pattern features on semiconductor, photomask and microdevice wafers. NIKON NSR-2205EX14C has a 5-inch projection area and can handle up to 6" wafers. It can operate at a variety of magnifications and provide resolutions up to 0.25 microns. The machine is capable of overlaying up to four different imaging channels in order to increase throughput and flexibility. It also has notching flexibility so that it can accomodate processing irregularities in a wafer. NSR-2205 EX14C features a beam blanking equipment that helps to ensure precise alignment. It also has an anti-reflection coating to reduce distortion. This system utilizes a high-resolution, long-wavelength Laser Interferometry Unit (LIS) to measure the position of substrates to an accuracy of 0.1 microns. The machine includes a stage driven by piezo actuators, which provides a high level of accuracy and repeatability. It also includes a Rastek-G gaseous servo tool which enables fine-positioning adjustments to the stage without jitter. NSR 2205 EX14C utilizes a linear motor for fast acceleration and deceleration, as well as highly accurate position detection. It can process up to 10,000 wafers per hour with a throughput of 150 mm/sec. The asset includes our proprietary NIKON Smart Corneal Alignment (SCA) model which can greatly reduce set up times. In addition to patterning wafers, NIKON NSR 2205 EX 14C can be used for a variety of high precision microfabrication applications such as aging, deposition and etching processes. It also has a variety of Wafer Easy Scanning (WES) modes, which enable automated non-contact wafer inspection and automated defect monitoring and classification. All in all, NIKON NSR-2205 EX14C is a highly accurate and reliable stepping projection aligner for all sorts of microfabrication applications. It is versatile and powerful, and is designed to meet the most demanding of production environments.