Used NIKON NSR 2205 i11D #293587312 for sale
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NIKON NSR 2205 i11D is a full-field i-line stepper designed for mass production of semiconductor devices. It utilizes highly sophisticated technologies such as NIKON original i-line optics, a full-field alignment equipment, a precision stage, a multi-zone auto-temperature control system, and auto-calibration technology for superior overlay accuracy. NIKON NSR-2205I11D stepper provides resolution down to 5nm (45nm pitch), and has in-column scanning technology to enable fast step and repeat times. This stepper also provides high availability with low cost of ownership, thanks to its advanced hardware and software. Optically, NSR 2205I11D utilizes a Chromatic Aberration-free optical unit that utilizes a full-field alignment machine that automatically adjusts the projection angle and lens tilt angle to ensure optimal alignment of the image. The optical tool also includes a laser interferometer that ensures high-precision focusing. The stepper is also equipped with a range-finding laser option, allowing it to accurately align the lens before starting imaging. The stepper's multi-zone auto-temperature control asset optimizes the temperature of the stage and enables superior imaging stability at the sub-micron level, making it a great choice for ultra-precision imaging and lithography. Additionally, a multi-zone wafer chuck provides stable wafer leveling and inspects the wafer before every imaging step, allowing for repeatable and consistent images. NSR 2205 i11D is also equipped with advanced software, allowing for automated and optimized setup processing. The stepper is outfitted with an array of calibration functions, including auto-defocusing to ensure optimal image quality, as well as a fully automated focus adjustment algorithm and auto-calibration technology to achieve the highest process repeatability and overlay accuracy. Overall, NIKON NSR-2205 I11 D is an excellent choice for mass-production semiconductor device manufacturing, as it utilizes advanced i-line optics, full-field alignment, range-finding laser, auto-temperature control, and precision software algorithms to ensure high accuracy, repeatability, and low cost of ownership.
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