Used NIKON NSR 2205 i11D #293606711 for sale
URL successfully copied!
Tap to zoom
ID: 293606711
Stepper
Resolution: 0.35
NA: 0.63
Exposure wave length: i-Line
Reduction: 1/5
Expose field: 22 x 22 - 17.9 x 25.2.
NIKON NSR 2205 i11D is a high-performance stepper designed for semiconductor device fabrication and other wafer fabrications. The stepper is designed to deliver precise and repeatable microfabrication results through an exceptionally wide exposure variation range, from 0.2 to 45.0 μm. The stepper also boasts of an extremely low alignment position accuracy of 0.05 μm, making it the ideal choice for high-precision processing and advanced technology development applications. NIKON NSR-2205I11D features a proprietary image centering equipment, which ensures precise alignment and positional accuracy over a wide range of exposure fields and substrate sizes. The centering system also compensates for substrate warpage, motion induced positional errors and reticle refresh defocus in order to provide a highly accurate and repeatable performance. The stepper is also equipped with an intelligent measurement unit, which provides detailed wafer observation, evaluation and feedback during a single exposure. A simple, intuitive user interface makes NSR 2205I11D simple to use and manage. The user friendly control section allows for fast, intuitive access to all stepper parameters, as well as detailed calibration and maintenance for a variety of processing conditions. The intuitive Graphical User Interface (GUI) enables automated recipes for simple setup and control, with visual processing review and traceability. Another central feature of NIKON NSR-2205 I 11 D is its advanced optical machine, delivering a clean imaging field with superior contrast and clear images. By using a phase shifting technology, the stepper is able to produce photomasks with extremely low defect density and a high contrast over a large exposure field. Furthermore, its high speed, low power scanning ability ensures up to 4.5 wafers per hour can be processed. The stepper's built-in temperature compensation and wide working area further enhance this capability. Overall, NSR 2205 I 11 D is a powerful, reliable and versatile stepper designed to deliver precise, high quality results in semiconductor device fabrications and other wafer processes. It is highly reliable, with a particularly low alignment position accuracy of 0.05 μm, and is able to process up to 4.5 wafers per hour. With a simple, easy to use user interface and advanced optical tool, NSR-2205 I11 D is an excellent choice for high precision and advanced technology development applications.
There are no reviews yet