Used NIKON NSR 2205 i11D #293607244 for sale

Manufacturer
NIKON
Model
NSR 2205 i11D
ID: 293607244
Stepper Lamp illumination: Average power: 560.407 mW/cm² Uniformity: 1.026% X-Y Axis: Maximum: 0.039, 0.028 Minimum: -0.039, -0.053 Lens distortion within ±0.050 µm Field inclination: Max-min within 0.230 µm Curvature within -0.029 µm UL-LR, UR-LL within 0.012, 0.092 µm Stepping accuracy: Stepping: 3δ≤45 nm - X:18, Y:42 Backlash: 3δ≤45 nm - X:28, Y:42 LSA-EGA 3δ+|X|≤70 nm Mean-X/3δ: 23 Mean-Y/3δ: 12 3δ+|X|: 14 3δ+|Y|: 32 FIA-EGA 3δ+|X|≤70 nm Mean-X/3δ: 8 Mean-Y/3δ: 26 3δ+|X|: 21 3δ+|Y|: 20.
NIKON NSR 2205 i11D is a top-of-the-line wafer stepper manufactured by NIKON. It is a fully-automated precision alignment machine, allowing for exact control over the exposure of a wafer. The wafer stepper is equipped with an optimized optics equipment and a motion control system, making it an efficient tool for both fine and high accuracy exposure processing. The precise optics unit is designed to reduce the deviation of exposure parameters and ensure an evenly-exposed surface that optimizes both throughput and yields. The device works by projecting a mask onto a wafer and using precise exposure settings to create a pattern on the wafer surface. The projected pattern is then applied to the wafer with a stepper motor that moves the projection area. NIKON NSR-2205I11D includes a high-precision servo motor coupled with an encoder that provides precise position feedback. This combination allows for precise exposure settings and optimized accuracy levels. The wafer stepper is capable of handling a maximum of 8-inch wafers with a maximum pattern accuracy of 1.9um across a 1° exposure angle. NSR 2205I11D is designed to reduce downtime and maintenance costs thanks to its long-life, reliable design and short maintenance times. It also features an automatic pre-aligner that ensures precise alignment, even when the stepper is out of calibration. The device is equipped with a user-friendly interface and a full range of input and output options that enable easy control and monitoring. The machine can also be connected to other NIKON machines via an Ethernet connection. NSR 2205 I11 D is a comprehensive wafer stepper that provides precise, reliable exposure processing and improved throughput rates. Its optimized optics machine and motion control tool enable optimum pattern accuracy and reliability, while its high-precision motor and encoder enable precise alignment. Built for long-term reliability and low maintenance costs, NSR 2205 i11D is the perfect stepper for demanding exposure process applications.
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