Used NIKON NSR 2205 i11D #9160391 for sale

NIKON NSR 2205 i11D
Manufacturer
NIKON
Model
NSR 2205 i11D
ID: 9160391
Wafer Size: 8"
Stepper, 8" Reticle size, 6".
NIKON NSR 2205 i11D is a wafer stepper that is used for microlithography processes. This stepper has a light source of excimer laser (248 nm wavelength) for low reflection and absorption characteristics. The equipment also has a reduction projection optics that uses two lenses to reduce the reticle image and is compatible with techniques such as dark-field, light-field, focus variation, as well as brightfield. The laser enables high-powered variable optical pulse lengths with pulse widths of up to 300 ns, which is ideal for reliable patterning. This machine has a large table size of 53 x 63 cm and is capable of handling large wafers up to 200mm in diameter. To ensure precise alignment, it has a pattern positioning accuracy of 0.5 μm along the x and y axes, a field flatness of 0.2 μm, and a stage repeatability of ≤ 0.5 μm. It is capable of handling high-power laser exposure doses of up to 900 mJ/cm2. For further improvement on the productivity and throughput, it can process up to 1000 wafers/hour. NIKON NSR-2205I11D has a user-friendly control panel with an intuitive GUI for greater user convenience. The system also integrates with several advanced technologies such as Auto-Tune, a feature that automatically adjusts the parameters of the unit for improved accuracy and reduced waste. In addition, the use of the integrated Auto Recipe feature allows for faster job initialization and improved machine precision. This advanced wafer stepper comes with a preinstalled Align-Checker engine, which provides hole detection and extra image-analysis functions. It also comes with an edge detection function that is designed to detect processing defects in the thin-film area. Another helpful feature is its Serial Number Identity, which can customize job numbers and tracking codes. NSR 2205I11D is a reliable and high-performance wafer stepper that is ideal for semiconductor device production. Its advanced functions and automated features greatly improve productivity and precision, while the intuitive user interface makes it very easy to use.
There are no reviews yet