Used NIKON NSR 2205 i11D #9213593 for sale

NIKON NSR 2205 i11D is a latest generation high-precision wafer stepper with a multi-field processing function used for cutting-edge semiconductor lithography. It has a maximum resolution of 0.17 μm and a market leading value of 12,000 wafers per hour (WPH) throughput. It offers the ultimate in cycle time performance, yields higher quality images and greater flexibility. The equipment's features include stage accuracy of 19nm, auto focus spot size control capability, off-axis illumination, anti-reflection coating, polarization control, multi-field stitching, and a powerful genetic algorithm for auto-resolution optimization. It also has a new user-friendly touch screen monitor that allows a variety of online system adjustments. The stepper offers a wide range of exposure options, both left-to-right and right-to-left modes, enabling the unit to be used for single layer, double-layer and multiple-layer exposures. It also accommodates larger substrate sizes of up to 200mm, with a flatness accuracy better than 3μm over the entire substrate. The machine also supports a wide range of lighting and shielding sources including, an on-axis source, off-axis source and seven lamination sources. The tool is made of high-precision components and is built from a vacuum platform and stabilized using high silica nanogel insulation. NIKON NSR-2205I11D is highly reliable and reliable for a long working life. It is also highly efficient, as it maintains its accuracy and WPH when operating in a wider temperature range. In addition, it also has a low-maintenance design, consuming 45% less power than previous models and only needing regular maintenance every two years or 50,000 exposures. Overall, NSR 2205I11D wafer stepper is a reliable, powerful, and efficient machine that is capable of producing the highest quality lithography images in the industry. It is an ideal tool for semiconductor manufacturers who demand maximum performance and accuracy in their lithography processes.