Used NIKON NSR 2205 i11D #9244218 for sale
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ID: 9244218
Wafer Size: 8"
Stepper, 8"
Basic version: MCSV
Option version: OCSV
Lamp power
Uniformity
Stepping
Overlay(LSA): lXl+3σ
Overlay(FIA): lXl+3σ
Reticle rotation: Repeatability
Lens distortion: Min~Max
Reticle blind
Main computer:
Computer system
Hard Disk Drive (HDD): DKA200,300
Disk drive: Tape (DAT)
Illumination type: 1.75 kW Lamp
Wafer stage:
Ball screw
Ring type chuck
Reticle alignment: VRA, ISS
Reticle microscope: FIX
Wafer alignment: FIA, LSA
Auto focus: Multi point
Wafer loader:
Type 2
Flat type
Inline (Left)
Cassette (Left)
Control rack position: Right
Reticle loader, 6"+ extra
PPD2
Chamber type: S07
Temperature: 23°C
No bar code.
NIKON NSR 2205 i11D is a high-performance wafer stepper designed for both single wafer and cluster wafer processing. This machine is designed with a powerful DUV optics equipment, enabling high precision processing of even the most challenging substrates. NIKON NSR-2205I11D features a new generation step and repeat system, capable of achieving exceptionally high resolutions. NSR 2205I11D boasts an 11-mega-pixel sensor that enables 0.28µm alignments, with a large chucking plate offering superb repeatability and accuracy. This stepper also has a newly developed wafer alignment unit that can automatically detect the orientation of a wafer, allowing for repeatably precise alignment and placement of the photomask. It also includes a high-speed scanning machine, enabling high throughput and meticulous substrate inspection. NSR 2205 I11 D is powered by a 50MHz NIS controller and a scanner motor, giving it reliable and effective motion control. It also features auto-focusing and stitching functions for the highest degree of accuracy. With NIKON NSR-2205 I 11 D, both wafer stage and mask table positions are monitored and corrected for zero positional drift. NIKON NSR 2205I11D is an excellent tool for chip production, allowing users to achieve highly accurate and repeatable alignment accuracy. It comes with plenty of useful features, such as advanced auto-alignment, scanning, stitching, and auto-focusing capabilities, and I/O interlocks to prevent damage to the optics and the substrate surface. NIKON NSR-2205 I11D offers a great combination of high throughput, high precision, and reliable performance, making it an ideal choice for the most demanding chip and semiconductor applications.
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