Used NIKON NSR 2205 i11D #9244218 for sale

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Manufacturer
NIKON
Model
NSR 2205 i11D
ID: 9244218
Wafer Size: 8"
Stepper, 8" Basic version: MCSV Option version: OCSV Lamp power Uniformity Stepping Overlay(LSA): lXl+3σ Overlay(FIA): lXl+3σ Reticle rotation: Repeatability Lens distortion: Min~Max Reticle blind Main computer: Computer system Hard Disk Drive (HDD): DKA200,300 Disk drive: Tape (DAT) Illumination type: 1.75 kW Lamp Wafer stage: Ball screw Ring type chuck Reticle alignment: VRA, ISS Reticle microscope: FIX Wafer alignment: FIA, LSA Auto focus: Multi point Wafer loader: Type 2 Flat type Inline (Left) Cassette (Left) Control rack position: Right Reticle loader, 6"+ extra PPD2 Chamber type: S07 Temperature: 23°C No bar code.
NIKON NSR 2205 i11D is a high-performance wafer stepper designed for both single wafer and cluster wafer processing. This machine is designed with a powerful DUV optics equipment, enabling high precision processing of even the most challenging substrates. NIKON NSR-2205I11D features a new generation step and repeat system, capable of achieving exceptionally high resolutions. NSR 2205I11D boasts an 11-mega-pixel sensor that enables 0.28µm alignments, with a large chucking plate offering superb repeatability and accuracy. This stepper also has a newly developed wafer alignment unit that can automatically detect the orientation of a wafer, allowing for repeatably precise alignment and placement of the photomask. It also includes a high-speed scanning machine, enabling high throughput and meticulous substrate inspection. NSR 2205 I11 D is powered by a 50MHz NIS controller and a scanner motor, giving it reliable and effective motion control. It also features auto-focusing and stitching functions for the highest degree of accuracy. With NIKON NSR-2205 I 11 D, both wafer stage and mask table positions are monitored and corrected for zero positional drift. NIKON NSR 2205I11D is an excellent tool for chip production, allowing users to achieve highly accurate and repeatable alignment accuracy. It comes with plenty of useful features, such as advanced auto-alignment, scanning, stitching, and auto-focusing capabilities, and I/O interlocks to prevent damage to the optics and the substrate surface. NIKON NSR-2205 I11D offers a great combination of high throughput, high precision, and reliable performance, making it an ideal choice for the most demanding chip and semiconductor applications.
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