Used NIKON NSR 2205 i11D #9251004 for sale

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Manufacturer
NIKON
Model
NSR 2205 i11D
ID: 9251004
Vintage: 1996
Stepper MCSV Basic version: 2.31D OCS Option: 2.18A Main system: 2.42A Reticle loader Stage Operation panel Wafer loader Lens controller Alignment Main computer: System: VAX4000.90A Hard disk: DKA200, DKA300 Illumination type: SHRINC3 Revolver type: Conv, ann, small Wafer stage: Chuck type, 8" Screw type: Ball Reticle alignment: VRA, ISS Reticle microscope Wafer alignment: LSA, FIA Multiple auto focus Wafer loader, 8" Loader type: Type2 (A3) OF Type: Notch Flatzone: 6 O'Clock Cassette: Left and right Control rack position: Right side Reticle loader, 6" (13) Slots Wafer flatness: 1.510 um Wafer leveling: X: -0.248 sec Y: 0.049 sec Reticle blind setting accuracy: XP: 0.5 mm Xm: 0.6 mm Yp: 0.7 mm Ym: 0.5 mm Stepping: 3σ-X: 0.025 um 3σ-Y: 0.023 um INC Adjustment: Maximum-minimum: 0.311 um Curvature: 0.010 um UR-LL: -0.056 um UL-LR: 0.081 um DIS Adjustment: Maximum-X: 0.037 um Maximum-Y: 0.047 um Minimum-X: -0.051 um Minimum-Y: -0.044 um Exposure power: 565 mw/cm² Power uniformity: 0.934% 1996 vintage.
NIKON NSR 2205 i11D is a high-performance wafer stepper designed for advanced lithography lithography and inspection applications. It consists of two main components, a highly advanced illuminating equipment and an advanced moving stage. The illuminating system forms an optimized projection lens that projects a high-resolution pattern onto a semiconductor wafer, allowing for precisely formed features and greater uniformity. The lens is supported by a mercury-arc lamp, which provides a high degree of illumination over a large area. The optical components include a laser diode and a series of lenses that help provide uniform illumination. The illumination unit also features a projection lens crosshair for enhanced accuracy. The advanced moving stage is designed to smoothly move the wafer across the surface of the lens, providing a high degree of accuracy and repeatability. The stage can be programmed with a range of parameters, allowing it to make precise movements and achieve desired working distances while still providing the required exposure time. Advanced control systems are used to ensure that the wafer is precisely positioned. NIKON NSR-2205I11D is fitted with several safety and maintenance features that ensure its reliability and longevity. Its ergonomic design reduces operator fatigue, and its built-in maintenance reminder machine helps to reduce downtime. The wafer stepper also incorporates an environmental management tool, monitoring and recording temperature and humidity levels to protect components from damage. NIKON has designed NSR 2205I11D to provide high-quality, high-resolution images. Its advanced illumination asset and moving stage ensure accurate and uniform images, while its safety and maintenance features ensure reliable and lasting performance. NSR 2205 I 11 D is suitable for wafer lithography, inspection and metrology applications in semiconductor manufacturing facilities.
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