Used NIKON NSR 2205 i11D #9272637 for sale

NIKON NSR 2205 i11D Wafer Stepper is an advanced imaging equipment designed to provide superior overlay performance with high-speed and low-dose exposure. This system uses the new NIKON E37A unique i-line projection lens, is capable of supporting a range of wafer sizes up to 200mm wafer size and can accommodate high frame rates (up to 80,000 frames per second). This unit features a new integrated high-performance advanced OMA (Optical Mode Assurance) machine for high overlay accuracy and uniform exposure. It is designed with a Compact-Axis, dual-stage mechanism for stiction-free ultra-high resolution imaging and fast-focusing, allowing the user to access a variety of substrate applications for high-throughput processes. This tool also features a high-performance 14-bit TTL power supply, along with an automated PDL Compensation tool, which is used to precisely adjust the axis of orientation to reduce the best-fit value of mask-shift. This unique tool offers flexibility and accuracy in data access and analysis capabilities, while minimizing the depletion of energy consumption. NIKON NSR-2205I11D is also equipped with an advanced ActiveJob Processing™ asset. This integrated process control tool allows the user to program, optimize, and coordinate all imaging operations using a single interface. This model also integrates and shares job data wiith other systems, providing high levels of reliability and user productivity. The Equipment also includes unique auto-control capabilities which allows the user to configure wafer support, rotation and focus settings, as well as execute automated wafer centering operations. Finally, NSR 2205I11D also features an integrated thermal management system which monitors the temperature of the unit and utilizes heat-sinks to eliminate potential heat-related stiction.