Used NIKON NSR 2205 i11D #9276272 for sale
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ID: 9276272
Wafer Size: 8"
Stepper, 8"
Reticle, 6"
Notch, 8"
Loader type: Type 3 robot.
NIKON NSR 2205 i11D wafer stepper is a high-end micro-lithography equipment designed to meet the growing demand for more complex, miniaturized parts and components in the electronics and semiconductor industry. With its advanced technology and automated processes, NIKON NSR-2205I11D provides an advanced level of precision and wafer uniformity. NSR 2205I11D is designed to provide accurate and repeatable exposure of semiconductor wafers with state-of-the-art features that include true alignment and video overlay capabilities, three-dimensional (3D) imaging systems, fully automated scan and backlash management, and superior aerial image stability. The system also includes dual wafer stages for increased throughput capacity, a unique auto stage-level compensation unit, and a high-resolution digital control machine for repeatably reliable exposure. NIKON NSR-2205 I11 D combines advanced technologies such as collision detection to prevent excessive thickness of layers and other material defects, as well as Dose Management for Lithography (DML) for determining the optimum exposure for each layer. The tool's full-function Data Acquisition Asset (DAS) offers advanced real-time image registration analysis, including vertical alignment overlay and registration analysis functions. NSR 2205 I11 D also includes an offline function that provides trend analysis and comparison graphing of wafer processes over multiple wafers, with data stored locally or remotely. NSR-2205 I11D has also incorporated advanced Mask Clamp and X/Y stages for precise, repeatable exposure of mask patterns. This feature allows the correct mask registration and proper alignment with the wafer before exposure. It also is applicable for long-life precision alignment without mask misalignment and other material defects. The model uses field uniformity characterization for improved registration accuracy to support critical processes. NIKON NSR-2205 I 11 D also includes a fast, high-resolution motor-drive X/Y stage to enable high-precision wafer alignment. Its advanced motorized control equipment provides up to 10nm resolution for precise alignment and positioning of stepper elements. Additionally, it features a one-step inspection system to eliminate costly waiting times for inspecting individual features and an adjustable exposure cycle for improved throughput. In summary, NIKON NSR-2205 I11D is a cutting-edge wafer stepper designed to provide the highest precision, repeatability, and accuracy for projects requiring smaller dimensions, greater quality control, and quick turnaround times. Its advanced technology, advanced sensors, and automated processes ensure the highest quality and reliability of process results. The unit also offers superior imaging, uniformity, and processes management capabilities, providing a truly outstanding value for the money invested.
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