Used NIKON NSR 2205 i11D #9364624 for sale

Manufacturer
NIKON
Model
NSR 2205 i11D
ID: 9364624
Wafer Size: 2"-6"
Vintage: 2010
Steppers, 2"-6" 2010 vintage.
NIKON NSR 2205 i11D Wafer Stepper is a precision wafer stepper that offers a range of capabilities for the semiconductor industry. The stepper has a 12" automatic wafer size of 200 mm to 300 mm with a max wafer thickness of 0.3 mm and overlapping of 0.25 mm. The equipment has a high-resolution vision set up with a motorized N2/O2 generator integrated into the stocker and has an air bearing stage. The system also has the ability to process multi design applications and includes N2/O2 protection, heating function, and laser mark applied to the wafers. NIKON NSR-2205I11D Wafer Stepper offers excellent image pickup precision and high-resolution imaging capabilities with its dual CCD cameras. The proprietary image pickup unit utilizes two 2048 x 2048 pixel CCD cameras for excellent contrast, colorimetric accuracy, and resolution of 0.2 micrometers or better. It also allows for turn rotation so that both the front and back sides of the wafer can be imaged simultaneously. NSR 2205I11D Wafer Stepper also comes with a high-precision alignment machine. The tool has a total of 8 registration onto 5 optical markers in a dual camera asset and a 0.11 micrometer accuracy from the 1mm registration point. The model also has a unique optical design to ensure precise measurements across the different field sizes. NIKON NSR-2205 I 11 D Wafer Stepper also has a high-precision exposure equipment. This system has a high-performance shutter/detector mechanism and incorporates innovative illumination technology to ensure adequate uniformity of exposure irradiation and uniformity of layer thickness. This unit also provides a long lifetime shutter that ensures maximum image accuracy. NSR-2205 I 11 D Wafer Stepper also includes a high-precision projection machine. This tool is equipped with a 5-zone illuminating mirror, allowing for 5 different numerical apertures from 0.6 to 0.9. The asset has 6-axis adjustment including fine adjustment of all three axes with sub-micron resolution for precise focus and astigmatism compensation. Overall, NSR 2205I 11D Wafer Stepper is a highly precise model offering excellent image pickup, wafer alignment, exposure and projection capabilities. The equipment is ideal for production of micron-level patterns on ultra-thin substrates and enabling efficient production of advanced semiconductor devices and components.
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