Used NIKON NSR 2205 i11D #9383687 for sale
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ID: 9383687
Vintage: 1996
Stepper
Leveling incidents
NEST-V
Missing parts:
HLIB-IF Substrate
Inline front arm unit
Inline rear arm unit
Shutter unit
Bellows unit
STG Power supply
WL Power supply
RL Power supply
ALG Power supply
LC Power supply
OPD Power supply
ISS High voltage power supply
1996 vintage.
NIKON NSR 2205 i11D is a well-known wafer stepper used for photolithography purposes. It is one of the most advanced production tools available for semiconductor foundries and microfabrications alike. The device is equipped with a dual-chamber design and state-of-the-art optics that guarantee high-end resolution up to 1µm. NIKON NSR-2205I11D is equipped with an advanced auto-alignment feature that enables a high precision wafer placement accuracy. It also allows for fast wafer exchange and minimizing overlay errors. Additionally, the tool has ambient compensation feature that helps stabilize lithography performance in a changing environment. The device is equipped with an in-line wide range laser interferometer that provides full-field accuracy. It also includes a micro-pixel addressable monitor that helps diagnose and monitor variations in patterning results over time. The device is also capable of running multiple reticles and can be used for both single- and double-layer process runs. The LED of the device is equipped with a focusing ring and its illuminance is adjustable to 0.25 mW/cm2 for homogeneous illumination. This light engine offers superior uniformity and small field sizes of up to 5µm. The light source can operate within ±0.6% of target energy, thus minimising patterning errors and eliminating the risk of vertical step height errors. NSR 2205I11D utilizes the latest ESEDRF (Enhanced Spectrum Emission Diffraction Reduction Filter) technology, resulting in improved image quality as well as a greater depth of focus. The device also employs a unique crossfield correction software that helps to realign transferred patterns in the same direction and depth of field. Overall, NSR 2205 I11 D is an advanced and powerful wafer stepper which is ideal for electrical and optoelectronic integrated circuit production. It is the perfect choice for the most demanding lithography and microfabrication requirements.
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