Used NIKON NSR 2205 i12 #293606914 for sale

NIKON NSR 2205 i12
Manufacturer
NIKON
Model
NSR 2205 i12
ID: 293606914
Stepper.
NIKON NSR 2205 i12 is a high-precision, 12-inch wafer stepper designed to provide users with the highest level of optical lithography performance. This model was specifically designed for semiconductor device manufacturing, with its UV-based i-line light source and a field size of up to 8" x 10". The 2205 i12 features a high-speed, high-precision imaging equipment that leverages H-APO (High Accuracy Parallel Optical) technology to deliver fast and reliable alignment performance. This enables the machine to precisely position mask patterns on the wafer surface, with a repeatability of up to 0.2 micron. This wafer stepper features specialized illumination capabilities, including optics that provide top and bottom illumination in a single exposure, as well as stepped-width illumination to adjust image contrast and reduce critical dimension variation. It also has stable, reliable imaging throughout alignment and scanning operations, thanks to its low electromagnetic interference and vibration levels. This wafer stepper uses an advanced auto-adaption capability to adjust light/dark phase and contrast balance to provide optimum imaging results. It also uses improved M-EMRS (Multi-Energy Mask Reference System) technology, which improves the imaging process with more stable exposure conditions. NSR 2205 i12 also has a wide range of enhanced unit functions, including auto dose control and an advanced DENS version module, which both help to improve the throughput of semiconductor device manufacturing processes. In addition, it features a brand new head-PI protection machine that keeps the workpiece safe by preventing any unintended damage to delicate area edges. Overall, NIKON NSR 2205 i12 is a highly versatile and reliable wafer stepper that offers superior performance, ease of operation, and improved process throughput. It is designed to provide users with optimal lithography performance for a wide range of advanced semiconductor device manufacturing processes.
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