Used NIKON NSR 2205 i12D #9092552 for sale

NIKON NSR 2205 i12D
Manufacturer
NIKON
Model
NSR 2205 i12D
ID: 9092552
i-Line Steppers.
NIKON NSR 2205 i12D is an advanced wafer stepper featuring a high-precision patterning system and superior productivity.NIKON NSR-2205I12D is an advanced imaging stepper utilizing a 'top-down' and 'across-gate' patterning technique, making it ideal for a wide range of applications such as IC devices and circuit boards. Featuring multiple field sizes, this stepper supports a wide range of substrates from ultra thin glas (UTG) and thin glass (TG) to low illumination substrates.Its variable slit width generation capability provides accurate exposure, along with high accuracy patterning in line-widths and depths up to 0.3 μm. The wafer stepper is equipped with a high-performance projection optical system comprising two lenses and eight mirrors. The system is designed for fast, smooth motion and excellent placement accuracy.It also enables dual-field patterning which requires less time and fewer operations compared to single-field techniques. NSR-2205I 12D also boasts advanced control systems with patterning performance support and FOUP handling, along with a high-speed 45nm scan step to ensure the highest throughput.It is also equipped with pattern data visualization to make assessments of substrate uniformity simple and reliable.In addition, it offers a comprehensive suite of pre-alignment, alignment and review functions. Further features of NIKON NSR-2205 I12 D include a 300mm stage, a loading frame gap of 160mm, a maximum positioning speed of 15,000 steps per second and a maximum accuracy of ±1 μm. The wafer stepper is also equipped with auto-centering to ensure that substrates are always accurately positioned for exposure. NSR 2205 I 12 D is designed for a wide range of production requirements and offers increased productivity, efficiency and accuracy for high-precision patterning.Featuring its high-evaluation dual-field patterning ability, this stepper is ideal for a range of applications from microprocessors to hard disk drives, MEMS and LED fabrication.
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