Used NIKON NSR 2205 i12D #9238335 for sale

Manufacturer
NIKON
Model
NSR 2205 i12D
ID: 9238335
Wafer Size: 8"
Vintage: 1997
Steppers, 8" Lamp power: About 500 mW Uniformity: 3.6% NA Variable system: 0.63 δ Reticle size, 6" Fixed reticle microscope Maximum field size: 22 x 22 mm Reticle SMIF Extender library: Left to right Reticle case, 6" Wafer type: Notch Wafer chuck, 8" Wafer chuck type: Ring Pre alignment 2: Notch, 8" Pre alignment 2: Hammer, 6" Wafer loader: Type 3 Chip leveling In-line: Left Wafer carrier table: Left / Right Alignment sensor: FIA (No wafer alignment assist microscope / LSA) Rack type: Normal Body-OP rack cable: 3m (Normal) No wafer edge exposure SHRINC: Type 1, 2, 3 No signal tower No power meter / Test reticles (A,DIS,C,CD,MF) No reticle cases No remote controller Chamber: ASAHI Chamber temperature: 23.0°C Hard disk drive (HDD) Electric source with NEMA box 2-Lines for CVCF / UPS 1997 vintage.
NIKON NSR 2205 i12D is a high-performance scan and exposure equipment designed for meeting the needs of advanced Device manufacturers. This latest model in the NSR Series is designed to enable high-precision alignment and accurate repeatable exposure. Utilizing a newly designed optical system and built-in ASML® motor and encoder interface, NIKON NSR-2205I12D offers high repeatable performance and unparalleled throughput. NSR-2205I 12D is capable of exposing wafers up to 12-inch in diameter and has a numerical aperture (NA) of 0.6, giving it an improved resolution and shot-to-shot repeatability of ±0.5µm. For increased precision and reliability the unit utilizes a diffraction-limited numerical lens machine with a stepped pupil which eliminates distortions, optical aberrations, and lens flares for maximum uniformity. Additionally, its advanced active alignment tool performs up to 295,000 alignment points with 0.25 micrometer accuracy, thus providing perfect device alignment. The asset also utilizes NIKON patented 'bathtub' control model to control various elements such as lens temperature, film thickness, and pattern accuracy. Additional features of NSR 2205 i12D include autofocus capability, auto calibration, and a high contrast monitor which provides an enhanced viewing window during wafer inspection and alignment. In addition to providing superior performance, NSR-2205I12D is also equipped with a robust user interface which allows users to easily select among a wide range of exposure and alignment options. It is also designed with a set of common errors like particle errors and focus variation that can be easily compensated for and adjusted with the equipment. All of these features make NIKON NSR-2205I 12D an ideal choice for Device manufacturers who demand precision and rapid throughput. Its outstanding performance and user-friendly interface make this wafer stepper one of the best in the market.
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