Used NIKON NSR FX-601F #9255391 for sale
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ID: 9255391
Vintage: 1998
Stepper
Gen 2 (370 mm x 470 mm)
Gen 3 (550 mm x 650 mm) LCD panels
Resolution: ≦ 2.4 µm (Isolated pattern), ≦ 3 µm (L/S)
Projection magnification: 1: 1.25 x
Exposure field 120 mm square to 98.78 (H) × 138 (V) mm (≦ ø 169.71 mm)
Reticle size, 6"
Holds: ~(50) Reticles
Overlay: ≦ 0.5 µm (EGA, |M| + 3σ)
Throughput: (30) Shots, 65 sec (40 mJ/cm²)
1998 vintage.
NIKON NSR FX-601F is a high-performance wafer stepper designed to meet the demanding requirements of the semiconductor industry. The FX-601F provides state of the art feature recognition, precision alignment, and process control. It has a unique hybrid drive equipment and can handle substrates up to 8-inch diameter, and can accommodate large-field exposure or small-field exposure, while also providing advanced multi-field stitching and stitching optimization. The FX-601F's hybrid drive system utilizes a combination of direct-drive and geared-drive linear motion, allowing for high-speed transfers of large substrates with high reliability. In addition, the FX-601F also utilizes an air bearing unit which helps to reduce overall elongation and thermal expansion resulting in a more consistent performance across various environments. This feature recognition technology also makes the FX-601F highly capable of handling smaller and complex substrates. The FX-601F features an advanced multi-field stitching operation. This allows for high-resolution stitching using the optimization software built into the machine. This optimization minimizes the number of fields, tracks, and overlaps needed to achieve the required accuracy and provides maximum efficiency by minimizing user input. The FX-601F also features a unique and advanced feature recognition tool. The asset is able to precisely identify and register features with a high level of accuracy, resulting in a high yield rate for even the most complex patterns. The high-end optics of the FX-601F ensures both superior image quality and high accuracy. The FX-601F also includes a high-speed auto-focus model, as well as motorized stage for easy sample movement. The FX-601F includes a full range of standard tools to further enhance productivity and reliably meet the highest possible performance requirements. The FX-601F is designed to reduce downtime, improve quality, and ensure high yields due to its advanced features. NIKON NSR FX 601 F is an advanced wafer stepper that is designed to meet the demanding requirements of semiconductor manufacturing. With its hybrid drive equipment, feature recognition, and multi-field stitching capabilities, the FX-601F is a reliable and powerful tool for various substrates. Its advanced optics, auto-focus system, and motorized stage maximizes the production throughput, allows for precise sample movements, and ensures superior image quality. The FX-601F is an ideal tool for semiconductor fabrication that provides optimal performance and reliability.
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