Used NIKON NSR G7 #9226167 for sale
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NIKON NSR G7 is a top-of-the-line wafer stepper (stepper lithography equipment) used for the fabrication of integrated circuits. It features an advanced projection imaging system that enables the projection of up to 15million resolution elements onto a wafer substrate. It has a high-end resolution of 4 nm, stereo lithography measurement to 5 nm, high-speed scan capability of up to 800 wafers per hour, and nano positioning accuracy within 0.2 μm. The control unit of NSR G7 includes a two-dimensional optical scanner, a projection machine with variable magnification, and NIKON Pattern Generator (NPG). The optical scanner enables reliable imaging with a 10 times higher imaging rate than that of previous systems. The projection tool has a high accuracy for critical dimension (CD) control and includes NIKON proprietary Variable Magnification Asset (VMS) technology. The VMS allows the user to select ideal magnification for various processes. The NPG generates precise patterns with excellent repeatability for even smaller patterns. NIKON NSR G7 utilizes NIKON advanced processes, including mirrorless auto-alignment, highly-featured pattern generator, and process control software for further enhanced fabrication capability. The mirrorless auto-alignment eliminates the need for manual alignment with a reference mark. This capability enables faster fabrication of high-density designs on the same wafer. The NPG Pattern Generator provides a great flexibility in generating patterns in advanced-node lithography processes with up to 40% productivity enhancement. In order to reduce the time for process optimization tasks, the process control software makes it possible to automatically adjust and optimize processes without having to write a program. NSR G7 is also equipped with an advanced model architecture for wafer-to-wafer alignment, enabling 1 μm placement accuracy for the large-scanning fields. As a result, it provides high throughput, excellent throughput uniformity, and greater overlay accuracy over wide field of views. The equipment also features a thorough auto-chucking system that secures thousands of wafers for processing and promotes high efficiency. Overall, NIKON NSR G7 is an advanced lithography unit with extreme accuracy, high resolution, and plenty of capabilities in one reliable machine. It is an ideal choice for a variety of manufacturing processes from leading-edge fabricator up to bulk production quantity.
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