Used NIKON NSR i10 #293634217 for sale

NIKON NSR i10 is a top-of-the-line wafer stepper designed for use in the most advanced lithography processes. NSR i10 provides excellent performance with high throughput and resolution while achieving exceptional overlay accuracy. The unit is built with a highly reliable, non-contact, airtight, vacuum chamber, making it ideal for production or research and development. NIKON NSR i10 is powered by a three-axis motor drive equipment, allowing high-precision motion control in all three axes. Dual, 400kHz amplifiers enable fast, synchronous high-speed scanning and fast positioning. In addition, the stepper includes numerous advanced features such as real-time focus monitoring and autofocus optimization, enabling consistent performance and exceptional overlay accuracy. The unit further features a Compact Interface System (CIS) Form which allows for automated configuration and easy set-up. The stepper is equipped with a microscope for overlay evaluation, and it also has an integrated imaging unit for anomaly detection. The advanced optics setup provides a minimum aerial image resolution of 0.25 microns. Moreover, the advanced illumination machine allows for the use of a variety of illumination sources and features a highly uniform several-order dark field scattered pattern for minimizing diffraction effects. NSR i10 also incorporates a streamlined advanced alignment procedure, guaranteeing accurate grating alignment even when metrology targets are not available. The high-precision motion control extends to all components, allowing for precise alignment of the reticle, resist and photomask. Additionally, the stepper includes ample capability for programming, with complex logic operation and user-defined scripts, allowing integration into a wider tool. The compact size and light weight make NIKON NSR i10 a perfect solution for space-constrained areas. The combination of an airtight housing and powerful controls gives NSR i10 the ability to handle the most extreme environment conditions. The combination of robust performance, high-precision, and versatile features make this wafer stepper a great choice for most production applications.