Used NIKON NSR i10 #9237557 for sale
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NIKON NSR i10 is a fully-automated wafer stepper designed with maximum precision and throughput in mind. The equipment leverages lens-based imaging technology to quickly and accurately produce images of the wafers being processed. By integrating such a high level of automation into its design, NSR i10 is capable of surpassing previous stepper systems in terms of throughput and accuracy. The base unit of NIKON NSR i10 is comprised of a 150 mm stationary stage, x-y-z height adjustment and a turret spindle that can accommodate multiple lens and tool capabilities. This is complimented with a 6-axis robot for movement, allowing different stages of substrate processing to be performed quickly. An advanced optics system is also included, which consists of an on-axis telecentric illuminator with a configurable field lens array, as well as a computer-controlled shutter. These features provide accurate, clear images with minimal lighting fluctuations. NSR i10 is also equipped with a number of imaging features, such as a high-precision color filter, which increases image sharpness and helps highlight defects. It also includes a motorized shot-to-shot focus control, for faster and more accurate optical measurements. Additionally, a light-on-demand exposure unit is available, allowing users to adjust exposure times on the fly to accommodate different product and process requirements. In terms of performance, NIKON NSR i10 machine is capable of producing up to 100% die yield and feature sizes down to 0.2 micrometers, making it well-suited for both prototype and production-level microfabrication processes. Furthermore, the tool is also compatible with NIKON pattern verification software, allowing users to quickly determine if the images generated meet desired specification standards. Overall, NSR i10 is a powerful, feature-rich tool for the microfabrication industry, capable of quick and precise wafer processing. With a robust suite of imaging and control features, as well as high performance measures, NIKON NSR i10 is well-suited for a variety of microfabrication applications.
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