Used NIKON NSR i11D #293615304 for sale

NIKON NSR i11D
Manufacturer
NIKON
Model
NSR i11D
ID: 293615304
Wafer Size: 8"
Vintage: 1995
Stepper, 8" 1995 vintage.
NIKON NSR i11D is a precision wafer stepper designed for the most demanding lithography requirements. Utilizing state-of-the-art imaging and alignment accuracy technologies, the i11D is an ideal solution for wafer fabrication, advanced packaging, MEMS, TSV, and 3D printing applications. The device is equipped with the latest NIKON lithography equipment. It features a patented single-impulse-beam scanning system to achieve superior imaging performance, resulting in better device yield. NIKON Pro-Lith™ software provides a user friendly interface and powerful automation capabilities, ensuring clear and consistent patterning across multiple wafers. The i11D also features an advanced imaging and alignment unit. It utilizes high dynamic range imaging machine and a patented local grid alignment (LGA) process to provide a seamless alignment accuracy of up to ±2 micrometers. This technology enables the tool to reliably position and align the sensors, providing the highest imaging accuracy for advanced packaging and MEMS technologies. The i11D's advanced patterning asset also features an ultra-precise beam control capability to ensure the highest imaging accuracy. It has the capability to accurately adjust beamCurrent, focus, and slice settings to optimize the desired pattern resolution. Additionally, it has a flexible substrate rotation and tilt correction model, which provides a high level of uniformity and accuracy across multiple wafers. NSR i11D is designed for demanding lithography applications requiring the highest imaging and alignment accuracy. With its advanced imaging and alignment systems, superior imaging performance, and advanced control capabilities, it is an ideal solution for wafer fabrication, advanced packaging, MEMS, TSV, and 3D printing applications.
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