Used NIKON NSR i12D #293609816 for sale

NIKON NSR i12D is a versatile wafer stepper used in advanced semiconductor manufacturing processes. Its high accuracy and productivity are suited for next-generation device fabrication needs. The i12D is equipped with a 12" wafer size maximum and two coherent scanning laser beams generated by an ultrahigh-power laser source. This provides an extremely precise alignment accuracy of down to 0.1µm and a resolution of up to 0.08µm. It is capable of exposing multiple field sizes simultaneously and eventually achieving sub-micron structures. This feature is used to minimize production time and minimize the amount of correction during semiconductor patterning processes. The i12D also features a removable laser head for easy maintenance, as well as automatic alignment and focus adjustment functions that improve operator efficiency. Additionally, an integrated lithography software enables efficient pattern control and evaluation of results. Additionally, it is designed with a low vibration frame to reduce the footprint and protect the surrounding environment. NSR i12D is a flexible platform that can deliver both alternating order exposures (AO) and stand-alone exposures while supporting a range of power sources, including standard and non-standard lenses. It also supports thin-film coating to accommodate thin-film transistor devices. In terms of power, the i12D is equipped with an advanced 9-axis control system that enables multi-axis control during its exposure process. This promotes precise, repeatable performance for all exposure operations. Additionally, its embedded pattern correction software permits improved resolution and feature size accuracy. Overall, NIKON NSR i12D is an ideal wafer stepper for advanced semiconductor processes. Its features make it well-suited for the next generation of device fabrication, empowering manufacturers to reduce production time and increase yields.