Used NIKON NSR i7 #9226166 for sale

Manufacturer
NIKON
Model
NSR i7
ID: 9226166
Wafer Size: 6"
Stepper, 6".
NIKON NSR i7 is a high-performance lithography equipment designed for photolithography applications. It is a wafer stepper capable of producing extremely precise patterns with advanced feature and overlay accuracy. NSR i7 uses five optical modules, which each contain an isolated light source, lens, and precision stage to give the system outstanding high-resolution imaging capabilities for successful patterning of high-density circuits. This unit also combines many thin-film patterning techniques to create complex designs and 3D features in a single step. NIKON NSR i7 is designed to work with a wide range of lithography techniques such as positive and negative imaging, electron beam lithography, direct writing, and deep-UV exposure. The machine utilizes an advanced scanner design that is capable of producing highly accurate scribe line profiles with improved CD linearity. It also offers precise laser alignment functions that are capable of rapidly aligning patterns with precision within 0.1 μm accuracy. This tool is integrated with a broad range of work processing units, including a user terminal, exposure station, cleaning station, higher-order alignment asset, and image-data processing unit. NSR i7 is packed with advanced inspection and measurement capabilities that enable fast and simple device optimization. It also features automatic process filter control to provide improved device yields. NIKON NSR i7 is powered by the ATHENA software suite, which contains built-in tools for detection, analysis, and visualization of defects. This software package is designed to help users maximize their total integrated process performance. It also features a large screen and touch panel for quick and easy model operation and programming. NSR i7 has an extensible 3-level stage design that offers user-friendly steps for wafer loading and unloading as well as integration of various wafer-handling systems. The wafer stage is designed with an adjustable vacuum equipment to support a wider range of wafer sizes. The wafer cassette loads wafers to the correct position with maximum accuracy and speed. With its ultra-high throughput, NIKON NSR i7 provides customers with improved device yields, productivity, and cost savings. The system's intuitive user interface and high resolution imaging capabilities ensure that products utilizing NSR i7 unit meet the highest quality standards.
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