Used NIKON NSR S204B #293598414 for sale

Manufacturer
NIKON
Model
NSR S204B
ID: 293598414
DUV Scanner.
NIKON NSR S204B is a high precision, step and repeat exposure equipment that is ideal for semiconductor IC manufacturing. It is an excellent choice for a variety of IC packaging processes including MEMS, TSV, 3D IC and advanced lithography processes. The S204B features an advanced optical system to deliver high throughput and a field of view that can accommodate multiple wafer sizes. It is based on a four-sided tabletop design, with four exposure stations to accommodate up to four 4-inch wafers at once. The stepper has an industry-leading resolution of 4.0um and a maximum field size of 33mm x 33mm. It supports flexible reticle sizes, with a reticle stage that can accommodate up to 100mm reticle masks. It can also support deep ultraviolet (DUV) and immersion lithography by using a range of compatible masks and lenses. The machine features a highly reliable and high speed servomotor unit with a maximum of 150W of power. It has a high precision alignment machine, with a repeatability of 0.25um and an accuracy of 0.4um. The maximum scan speed is 15.2 scans/second in X/Y directions, and the axis acceleration is up to 15.25 G. The machine also offers excellent stability and reliability for longer exposure times. It has an integrated chiller to ensure the machine stays cool and optimizes the stability of the exposure area. The chiller also helps to reduce the effects of thermal expansion, and the S204B can withstand temperatures of up to 40 degrees Celsius. The S204B is equipped with a range of features to ensure high productivity. The automated wafer loading and unloading systems reduce manual labor and increase throughput. It also features a fast internal focus adjustment tool that can be used to fine tune the focus of the reticle in a few seconds. Additionally, the machine offers remote diagnostics and a customizable user interface that allows users to maintain and monitor the machine in real-time without requiring a technician. In conclusion, NIKON NSR-S204B is a powerful and reliable stepper that can deliver high throughput, precision, and flexibility. The machine can be used for a wide range of semiconductor IC manufacturing processes and its excellent speed and accuracy make it ideal for advanced lithography processes.
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