Used NIKON NSR S205C #293619857 for sale

Manufacturer
NIKON
Model
NSR S205C
ID: 293619857
Vintage: 2005
KrF Scanner 2005 vintage.
NIKON NSR S205C step and scan equipment is a high-precision, high-resolution state-of-the-art lithography system designed for advanced photolithography processes in semiconductor production. This unit is capable of producing the highest quality images and patterns with minimal processing times. Its beam source is a highly efficient ArF (gas discharge excimer) laser light source, which provides a highly precise spot diameter of 5 microns and a maximum light intensity of approximately 100 mW/cm2 in the scan field. The machine is available in two configurations: scan-only and stepper/scanner. The scan-only mode is for exposures with large image patterns, which do not need to be repeated or registered. The stepper/scanner mode connects the tool directly to a stepper, allowing integration and repeatability of large fields of critical features with great precision. The S205C is equipped with three independent galvanometer scanners. The main scanner is responsible for scanning the whole field while the two sub-scanners are used to achieve a high 2D line width resolution of 0.7 microns. The main scanner uses a unique single-spot beam to decrease scanning time and reduce image distortion. The asset also features an advanced imaging model of an advanced CCD camera in combination with a continuous range of lenses. This allows users to increase the scan resolution up to 0.4 microns for precise circuit patterns. The user interface of the equipment is designed for efficient operation and powerful control of the setup. The operation panel and the 4.3" color LCD display provide control over all the parameters while the alarm functions provide easy management of the system. The unit also offers a number of convenient network functions, such as a web browser, an IP address, or Ethernet connection. Another popular feature of NIKON NSR S 205 C is its built-in auto-alignment machine, which automates the process of aligning the stepper and scanner. This ensures minimal pattern misalignment, which can lead to image degradation and loss of yield. NSR S205C is a highly efficient and precise lithography tool designed to meet the extreme demands of production line photolithography. It is a safe and reliable choice for industrial semiconductor production and is suitable for the production of a wide range of very advanced optical circuits.
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