Used NIKON NSR S205C #293621756 for sale
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ID: 293621756
Vintage: 2002
KrF Scanner
Load chamber
Chamber and accessories
IIU
BMU
AB Rack stand
CYMER ELS-6410 Laser
Illumination unit
FAB AC
Transformer
NIKON S53 Chiller
AMP Rack double / Single and accessories
2002 vintage.
NIKON NSR S205C wafer stepper is a state-of-the-art wafer stepping tool used in semiconductor device fabrication. The S205C is capable of scanning round wafers up to 8 inches in diameter and allows for high-precision patterning that is well-suited for lithography applications. The S205C has a well-designed optical equipment that uses NIKON lithography optics technology in combination with sophisticated control systems to ensure accuracy and reliability. The S205C offers a number of features that support the process of accurately printing the patterns onto the wafer. The optics on the S205C are driven by a motorized stage that allows for precise movement of the wafer for fast and accurate beam alignment. The device is also capable of high-precision focus detection, allowing for tight control in terms of focus lens position and wafer profile. The combination of these features ensures that even small features are accurately printed on the wafer each time. The handling system of the S205C is also designed to maintain optimal performance. The handling unit is composed of a vacuum chuck and a 6-axis robot that can accurately align and handle the wafers. This allows for high throughput and accuracy in terms of wafer handling. The S205C also has many built-in safety features that help prevent contamination and accidental exposure to dangerous lithography gases. Finally, the S205C has a range of user-friendly software that helps simplify the lithography process. The software allows users to setup, monitor and control the machine remotely, allowing for increased flexibility and productivity. The software also includes built-in functions that enable easy data recording and analysis for quality control. In summary, NIKON NSR S 205 C is a wafer stepping tool that is designed to support the accurate and efficient production of semiconductor devices. Its superior optical tool, accurate handling asset and user-friendly software make it a popular choice for high-precision lithography applications.
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