Used NIKON NSR S205C #293639083 for sale
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NIKON NSR S205C is a multi-field imaging stepper that is widely used in the semiconductor industry. NIKON NSR S 205 C features high-precision, high-throughput lithography performance with its 2.05-micron resolution. The wafer stepper is built with a laser interferometer to ensure accuracy and repeatability of exposure field alignment. The machine is designed to support a full range of production needs, from small to large wafer size from small to large device size. It supports a full range of mask sizes from 4 to 12-inch and is able to accommodate mask sizes up to 200mm. The stepper offers a wide range of lens options to meet various exposure requirements. The available lenses include high NA (Numerical Aperture) lenses such as 0.65NA and 0.60NA, as well as high NA S-type lenses. The equipment uses a high-speed, high-resolution scan mechanism to ensure that multiple exposure fields are accurately and simultaneously registered. NSR S205C also features a range of integrated automation functions, including vision-aided alignment and autofocus, which enable its users to reduce the time required to set up each job. In addition, the stepper is equipped with a number of special features to enable pattern inspection and overlay analysis functions for specific device types. These functions include an autofocus and measurement system for electrical device patterns, pattern defect detection, and improved pattern shapes for optical devices. The stepper's reticle stage offers a higher level of repeatability than conventional systems, with a rotational accuracy of 5 arc seconds. NSR S 205 C includes a variety of process control options, such as a multiple program cycle function and the ability to store multiple masks and recipes. The stepper is also compatible with a variety of DPEC (Data Processing and Evaluation Control) software, providing automatic wafer map, flexible exposure parameter settings and sequential chucking control. NIKON NSR S205C also supports a variety of inspection, monitoring and measurement systems. Overall, NIKON NSR S 205 C is an ideal unit for production of semiconductor devices. It features advanced imaging and accurate alignment technology, multiple lenses and automation features, as well as high-precision and repeatable machine traits. The stepper's features make it an excellent choice for a range of application requirements.
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