Used NIKON NSR S206 #9196486 for sale
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ID: 9196486
Wafer Size: 12"
Vintage: 2004
Scanner, 12"
Currently de-installed
2004 vintage.
NIKON NSR S206 is a wafer stepper that is part of the company's cost-effective NSR series of steppers. It is designed for efficient and precise processing of semiconductor wafers in high-volume mass production fabrication processes. NSR S206 is capable of advanced patterning with its optical components, as well as layer-to-layer overlay, making it ideal for medium and small features with line width control down to 0.2-micron. This particular stepper uses a CCD-type pattern generator to generate image data from the CAD drawing input data, for use in the photomask-producing process. It also integrates a powerful CASSSPEC scanning equipment, for fast pattern transfer and optimization of exposure parameters with simple preset settings. With its up-to-date Dose Control Algorithm (DCA) and Active Pixel Count (APC), NIKON NSR S206 gives the best uniformity in exposure dose across the wafer, resulting in uniform patterning across the entire wafer surface. NSR S206 is highly automated and is designed to reduce human intervention, creating highly uniform, defect-free patterning with low-maintenance high-accuracy dual-stage substrate positioning, waferChuck, and vacuum system. Its unique exposure unit architecture supports multiple exposure fields without the need for additional time or cost, meaning it can rapidly switch between fields during processing. Equipped with a CleanTrack wafer-cleaning machine for removing organic and metal contamination from the wafer, NIKON NSR S206 offers high productivity and total efficiency without compromising on quality. It also works with a full range of advanced lithographic materials, including high-resolution resists, both positive and negative, and super-resolution resists. With its advanced photomask making improvements, pre-alignment systems for mask and wafer, and ultra-high resolution imaging technologies, NSR S206 is ideal for advanced semiconductor engineering and manufacturing needs. It is a highly efficient and precise wafer stepper that offers higher throughput and quality at a cost-effective price point.
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