Used NIKON NSR S207D #9391602 for sale

NIKON NSR S207D
Manufacturer
NIKON
Model
NSR S207D
ID: 9391602
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NIKON NSR S207D wafer stepper is a tool for high precision lithography used in the fabrication of semiconductor devices. It is ideal for device fabrication foundries, research and development labs, and educational institutions. The equipment is optimized for cost, accuracy, and throughput. The system is composed of two main components, an advanced optical projection unit and a motorized x/y stage for substrate movement. It also includes an autoloader for quick exchange of substrates. The optical projection machine is composed of a precision optical lens tool and a stepping motor for electro-optical modulation. The optics consist of up to 20 mirrors and lenses, including convex, concave, and achromatic optics, which are mounted together and delivered with the asset. The optics are characterized by low aberration, high optical resolution and good image quality. The advanced stepping motor enables high accuracy stage position control and lens rotation. The motorized x/y stage is designed for accuracy and speed. It is driven by a digitally controlled stepping motor and features advanced motion control. The stage has 400 mm x 400 mm range and can provide up to 500 mm/s rapid motion, controlled to the accuracy of 0.7 μm. The stage also includes fall prevention and crash protection. The autoloader allows protection of the reticle and glass plate, as well as rapid exchange of substrates for automated operation. In conclusion, NIKON NSR-S207D wafer stepper is an ideal lithography tool for device fabrication, providing high accuracy and throughput. It features a precision optical projection model, a motorized x/y stage, and an autoloader for quick substrate exchange. The equipment is designed for cost efficiency and accurate fabrication of many types of semiconductor devices.
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