Used NIKON NSR S306 #120927 for sale

NIKON NSR S306 is a photolithography equipment used to produce integrated circuit (IC) masks and small stepped features. The system is specifically designed for high resolution, sub-micron alignment, registration, and overlay capabilities. NSR S306 is designed to handle applications such as bare-wafer, film-on-wafer, micro-device, and advanced IC packaging distortion correction. The unit utilizes a robust NIKON 5X magnification and high-resolution stepper scanning machine, which is ideal for the creation of small line-width devices. The tool also supports deep- ultraviolet (DUV) and Xeon illumination. NIKON NSR S306 provides a full range of applications and high performance operation, including 12 inch field size, 1.06nm resolution, alignment accuracy of 1/50 micron, and a maximum throughput of 210 wafers/hour. For film-on-wafer applications, the asset can handle various kinds of films, up to 0.25μm thick, and can expose and process line widths of less than 0.3 micron. Additionally, the model's acceleration and deceleration are adjustable, allowing the equipment to process with low stepdisturbance and ultra-high speed. NSR S306 also features off-axis illumination, which enables it to process extremely large features. The system also features a high-speed CoaXPress Camera for fine, complex alignment and registration applications. NIKON NSR S306 also boasts fully automated, precision wafer handling, from cassette facilitation to pick-and-place operations. Wafer warpage and bottoming correction, plus wafer ID, metric data, and stage calibration can be done for each wafer individually or for a batch of wafers. NSR S306 is equipped with advanced image processing and analysis software, which can accurately assess processing results offline. This software automatically detects the marginal or damaged wafer and the faulty area on the wafer, allowing the user to quickly and accurately detect any defects. Other features of the unit include automatic reticle offsetting, advanced optics, and electronic cooling. NIKON NSR S306 is an ideal choice for advanced IC production requirements, providing superior accuracy, display, and automation. It offers extreme flexibility in terms of varying applications and processing speeds and is suitable for many applications such as advanced IC packaging distortion correction, exceptional line-width control, and extreme flexibility in terms of illumination, alignment, registration and wafer handling.