Used NIKON NSR S306 #9114893 for sale

NIKON NSR S306 wafer stepper is a precision equipment used in the semiconductor industry for lithographic processing. It is designed to align patterns with nanometre-level precision on 150mm to 300mm wafers. NSR S306 includes a projection optics stage, high-precision stage, slit scanning technology, and a spatial light modulator (SLM) digital mask. It has an industry-leading resolution of 26nm half-pitch. The projection optics stage includes an aspheric glass objective lens and an advanced wide-angle optics system. The advanced optics unit ensures that light is projected correctly and that it is free from optical aberration. The projection optics stage also has an autofocus mechanism for quick alignment. The high-precision stage allows for nanometre-level precision. This is accomplished by a closed-loop motion control machine and a heat-resistant scanning stage. This stage also includes a wafer handling mechanism, which allows wafers of any size and thickness to be loaded with ease. The slit scanning technology offers reproducible and accurate shaping of the display pattern and can scan at photoengraving repetition cycles of up to 600kHz. It is also used for low-dose slit imaging, which helps minimize image artifacts to provide a clear image. The SLM digital mask is used to generate the illumination pattern that is projected onto the wafer. This mask is made up of a special material that allows the light to diffract and form the desired patterns. NIKON NSRS 306 wafer stepper is a reliable precision tool that is easy to use and highly accurate. It offers excellent performance and is perfect for high-volume lithography production. The asset is designed for both research and development as well as mass production applications.