Used NIKON NSR S308F #293754616 for sale
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NIKON NSR S308F is a high-performance production-level wafer stepper. It's designed to provide superior imaging capabilities and increased throughput. The S308F comes with an advanced next-generation optics equipment, which consists of an aspheric crystalline compression lens, advanced diffraction elements, an aspheric reflective mirror, and a super-resolution shift mask creator. This optics system achieves superior pattern accuracy and accuracy of high-density fine patterning necessary in contact layers and device structures. The stepper's proprietary auto focus algorithm, which automatically adjusts the optics unit, provides accurate focus across the entire wafer. With a max field size of 250 mm and a depth of field of up to 3.5mu, the S308F is able to accommodate any type of lithography including ArF, KrF, DUV, and imaging in exposed bleached mass. The S308F is designed for easy operation with a powerful Windows-based machine that offers intuitive control of wafer imaging. The tool seamlessly integrates with data input and compilation in FabMaster, and is capable of storing up to 1000 wafer images. It also includes a scanner tool and connection to principal CAD systems. To ensure high-level productivity, the S308F includes several advanced functions including variable field stitching, a real-time imaging facility with CD-SEM mapping at specified locations, error mark inspection on CD-SEM, and an improved image correction facility for improving image brightness, LER, and CD uniformity. NSR S308F is a versatile wafer stepper designed for high-level performance with minimal maintenance requirements. Its advanced optics asset and wide range of wafer imaging tools allow for both quick setup and reliable imaging of various patterns. The easy to use Windows based model and integration with CAD and processing software also contribute to its high efficiency and reliability. NIKON NSR S308F is an excellent choice for production-level wafer stepper applications.
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