Used NIKON NSR S322F #293671643 for sale
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ID: 293671643
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Resolution: ≦ 65 nm
Exposure light source: ArF Excimer laser (193 nm Wavelength)
Reduction ratio: 1:4
Maximum exposure field: 26 mm x 33 mm
Overlay:
Single Machine Overlay (SMO): ≦2 nm
Mix and Match Overlay (MMO): ≦5 nm
Throughput: ≧ 230 Wafers / Hour (96 Shots).
NIKON NSR S322F is a next-generation wafer stepper designed to provide high resolution imaging at wafer scale. The stepper is designed to accommodate 48-inch diameter wafers, which are the industry standard for high-volume production. NSR S322F features advanced optics and imaging capabilities, providing nanometer-level resolution to ensure accuracy and repeatability. The equipment is also capable of indexing wafers to different heights for easy access and alignment. NIKON NSR S322F is equipped with an advanced CCD array camera that provides real-time feedback and digital control, allowing the user to configure the stepper quickly and easily for any application. The system also has a configurable image processing unit, which enables the user to optimize image quality in both the scanning and imaging modes. This feature also allows users to customize imaging parameters such as exposure time, lens aperture, and focus. As an outgrowth of the CCD array camera, NSR S322F includes an autofocus machine that helps ensure consistent image quality regardless of the height and exposure time of the wafer being scanned. NIKON NSR S322F also features a field imaging tool that allows users to scan large parts in a single cycle. The asset's multiple exposures capability allows users to scan different portions of the wafer at different exposures, resulting in higher resolution images. By taking advantage of this feature, engineers are able to quickly process wafers that contain multiple components. NSR S322F also has a light intensity controller to help ensure consistent lighting conditions. This ensures accuracy in imaging regardless of the time of day. Additionally, the stepper is compatible with a variety of image processing and software tools, such as image synchronization and image masking. These tools are designed to improve the productivity and efficiency of wafer processing applications. Overall, NIKON NSR S322F is a state-of-the-art wafer stepper that provides an ideal platform for industrial imaging. Its advanced imaging capabilities, field imaging model, CCD array camera, autofocus equipment, and light intensity controller provide unparalleled accuracy and imaging quality in a compact, affordable package.
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