Used NIKON NSR S620D #9401370 for sale

Manufacturer
NIKON
Model
NSR S620D
ID: 9401370
Controller NS2601/B Printed circuit board NIKON P/N: 4S025-412-1.
NIKON NSR S620D is a high-performance wafer stepper developed by NIKON to offer superior accuracy and precision to semiconductor manufacturing processes. NIKON NSR-S620D employs advanced scanning technology and optics to achieve performance and flexibility that are essential for high-end microchip imaging and etching. NSR S620D is designed using a fully automated equipment with a six-axis stage and tilt processing capability. This system provides maximum flexibility to process a wide variety of wafer sizes and can handle multiple wafer mounting configurations. NSR-S620D is engineered to support a wide range of exposure applications from optical lithography, photomask exposure, etching, and transient plasma exposure. NIKON NSR S620D features a robust positioning unit with a maximum step accuracy of 2.5μm. The 6-axis stage and tilt capability of NIKON NSR-S620D allow for precise positioning of the wafer and ensures uniform exposure levels. In order to maintain highest performance standards, NSR S620D is equipped with three-dimensional auto alignment of the lens and wafer during each exposure process. This optical positioning machine achieves a high degree of accuracy through the use of a series of cameras and a reference mirror. It also utilizes NIKON advanced laser alignment technology to ensure high positional accuracy. The high-precision optical imaging tool of NSR-S620D is capable of delivering up to 0.5μm resolution across the entire field of view. This superior performance is achieved through the integration of NIKON proprietary imaging optics and powerful illumination sources. NIKON NSR S620D is also built with a swept laser power adjustment asset to ensure an optimal uniform image over a full range of exposure parameters. In addition to superior imagingqualities, NIKON NSR-S620D is designed for maximum efficiency and throughput. The unit can support up to 12 wafers per hour, across a wide range of sizes and features. Additionally, NSR S620D is equipped with a built in dry vacuum cleaner and a nitrogen purge model to ensure a clean, dust-free environment. Overall, NSR-S620D is an advanced wafer stepper that offers superior accuracy and precision in high-end microchip imaging and etching processes. Providing a highly reliable and efficient production process, NIKON NSR S620D is an ideal solution for semiconductor manufactures seeking to improve their throughput and deliver superior results.
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