Used NIKON NSR SF120 #293589139 for sale

NIKON NSR SF120
Manufacturer
NIKON
Model
NSR SF120
ID: 293589139
Wafer Size: 12"
i-Line steppers, 12".
NIKON NSR SF120 is a high-precision wafer stepper used in the microlithography process. It is an advanced equipment designed to produce high-quality microstructures on silicon and other semiconductor substrates. This machine uses advanced optics and has a wide optical field. It has a 35mm field of view, which is the largest in its class. The light source is a 200mm laser and this product of NIKON has a coating on the edges of the optical elements to reduce reflections and flare. The microscope lens is also coated to provide a clear image of the sample. NIKON NSR-SF120 is equipped with a 6-axis motorized stage which enables precise positioning over the substrate with a resolution of 0.25μm. The stepper has a five-axis airflow system to minimize environmental vibrations, allowing it to achieve a sub-micron focus tolerance. NSR SF 120 is designed to accommodate a wide range of substrates and is capable of machining substrates up to 450mm in diameter. Its wafer handler is capable of providing secure vacuum holding of the substrate and enables accurate high-speed wafer handling. The unit's comprehensive automation ensures reliable and efficient performance. It has built-in programmable motor controllers and a user-friendly interface which can be used to input and manage steps and recipes for various applications. It also has a suite of mobile and stationary robotic components for complete control of the stepper. NSR SF120 also features an auto-focus calibration and alignment machine. This tool utilizes an advanced line-focusing algorithm to measure the edge focus of multiple lines on the substrate surface and then use this information to make corrections if needed. NIKON NSR SF 120 is a powerful and reliable wafer stepper suitable for a wide range of microlithography applications. It is ergonomically designed and well suited for high-volume industrial production.
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