Used NIKON NSR SF120 #9290519 for sale

Manufacturer
NIKON
Model
NSR SF120
ID: 9290519
Wafer Size: 12"
Vintage: 2002
i-Line stepper, 12" Resolution: 0.18 um Wafer loader type: Type 3, NC Pre2 Reticle size, 6" Maximum expose field size: 25 mm x 33 mm Reticle library: Load port (SMIF) PPD Bar code reader LSA, FIA Alignment system Front inline Chamber type: S52 2002 vintage.
NIKON NSR SF120 Wafer Stepper is a state-of-the-art wafer stepper for advanced semiconductor production. It is designed to enable high productivity in a variety of imaging applications and processes, such as advanced lithography, inspection, direct write or e-beam lithography. Utilizing advanced NIKON optics and the latest long-life projection exposure technology, the SF120 achieves outstanding accuracy, alignment, and speed, with a high resolution of up to 0.5 nanometers for ultra-high precision applications. The dual-stage wafer platform employs an active alignment equipment to ensure minimal alignment errors and an extra-long exposure range for long-wafer operation. The SF120's highly adaptable and modular design is the perfect solution for a wide range of cutting-edge multi-functional processes and applications. NIKON NSR-SF120 Wafer Stepper offers a host of industry-leading features to a variety of semiconductor production environments. With its 460 millimeter wafer span, the SF120 delivers repeatable and accurate overlay performance up to 0.2 microns. The solid-state laser light source is designed with an integrated exposure system providing stable and high throughput. The built-in automatic matching unit maintains a machine balance, resulting in superior alignment performance. In addition, NSR SF 120 Wafer Stepper provides an enhanced inspection tool with high resolution of up to 0.4 nanometers, making it ideal for inspecting precise device features on a wafer. It also boasts a wide exposure range and field correction capabilities, and supports a variety of reticles to enable complex multi-patterning and direct write lithography. NSR-SF120 Wafer Stepper is equipped with a user-friendly graphical user interface that features easy-to-use, intuitive controls to simplify operation and minimize downtime. With its flexible process environment, the SF120 provides lighter wafer deliveries and high throughput speeds to minimize operators' workload. Its advanced asset management solution also gives users the ability to manage schedules, track pattern characteristics, and monitor actual processing results. NIKON SF120 Wafer Stepper is backed by a comprehensive support network, providing superior quality assurance and long-lasting performance. Its advanced software asset allows users to rapidly complete their work with the highest levels of accuracy and reliability, ensuring quality production, little to no maintenance, and cost-savings over time.
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