Used NIKON NSR SF130 #293589675 for sale

NIKON NSR SF130
Manufacturer
NIKON
Model
NSR SF130
ID: 293589675
Vintage: 2005
i-Line stepper 2005 vintage.
NIKON NSR SF130 is an automated wafer stepper designed specifically to produce the highest quality semiconductor devices in the most efficient way. The product combines the latest in optical technology and mechanics, offering maximum shot capabilities with consistent results. The SF130 houses a light source composed of two condenser lenses, allowing for a highly efficient output. This equipment also includes a halogen lamp with a shutter, providing a source of uniform illumination for the system. The projector lenses of the stepper allow for a 4.6 μm shot accuracy on a range of 4"-8" wafers. In addition, NIKON NSR-SF130 contains a 1-axis stage and manual wafer loading. It has a wafer chuck designed specifically for stiffness and flatness accuracy, along with an automatic alignment unit without a rotary actuator, thus eliminating material buildup or scratching of the substrate. The patented compound optical machine of the SF130 allows for imaging accuracy and reproduction of patterns at micron levels. The stepper's screen curvature is designed to be the same as its template, making it easier to frame shots. It utilizes high contrast in the projection of shapes and patterns, and has a uniformed exposure field, making it possible to create high-precision images with a high contrast image height. In addition, the stepper also features autofocus for optimized image resolution, allowing for low resistance across a wide range of substrate sizes. NSR SF 130 further provides an updated, user-friendly graphic interface with enhanced diagnostics capabilities. The stepper offers streamlined calibration methods, ease of maintenance, and accommodating electronics. It contains an advanced controller that enables higher throughput with high accuracy. Overall, NIKON NSR SF 130 is a highly efficient and advanced wafer stepper, providing users with an affordable tool for patterning their finest semiconductor devices.
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