Used NIKON NSR SF130 #293630223 for sale

NIKON NSR SF130 is a specialized wafer stepper that is used for lithography processing in the production of high performance integrated circuits and other microelectronic components. It utilizes advanced, advanced scan methods such as variable shape beam (VSB) and selective focus/non-selective illumination (SFI/NSI) to maximize post-exposure resolution, improve pattern fidelity and ensure accurate pattern transfer. NIKON NSR-SF130 utilizes a programmable scan stage, which allows for significant flexibility in the movement and positioning of a lithography mask and substrate while a UV laser traces the mask pattern onto the substrate with extreme precision. This scan stage is capable of handling up to 8-inch wafers with a positioning (X, Y, and θ) accuracy of 0.05 μm. The repeatability of the scan is also very excellent at 0.1 μm. The stepper is also equipped with a high-precision dose control equipment that accurately controls the laser power and exposure time, as well as a vacuum chuck system that maintains the substrate's flatness and parallelism. Additionally, NSR SF 130 also has a closed-loop regulator unit that ensures the reduction of aberration caused by the thermal expansion of the mask, thus ensuring a high-resolution print. In addition to its impressive accuracy and performance, NSR SF130 is also highly efficient. Its built-in high-accuracy wafer alignment machine allows for shorter setup times and increased productivity, as does its optimized focus control tool which monitors and adjusts the wafer's position throughout the exposure process. Furthermore, its heat diffusion laser seal module significantly reduces heat radiation in the asset, thus enhancing overall model stability. Overall, NSR-SF130 is an incredibly advanced and powerful wafer stepper capable of delivering high-resolution prints with the utmost accuracy and speed. Thanks to its integrated dose control equipment, highly accurate scan stage, wafer alignment system, and optimized focus control unit, NIKON NSR SF 130 is ideally suited for safely and quickly producing integrated circuits and other microelectronic components of the highest quality.