Used NIKON NSR SF130 #293655222 for sale
URL successfully copied!
Tap to zoom
NIKON SF130 is a mid-range wafer stepper used in semiconductor wafer fabrication. It is an acclaimed piece of production equipment widely used in chip production, photomask production, and advanced device packaging. NIKON SF 130 has a standard scan field size of 5.9 inch (150)mm or measured in steps up to 4.95 micrometers. It provides a high uniformity of exposure field size, flatness, and resolution across the entire scan field. It has 25 mm distortion correction and 10 mm autofocus capability, allowing for highly precise and reliable optical scanning of the wafer. SF130 is a step-and-scan system with a high speed Linac. Its source is a krypton (Kr) ion laser with a wavelength of 532 nm. The laser has a wide range of power levels and is able to scan up to 100 um/Sec or up to 20 X/s. It is equipped with a 28.5kV power supply to allow for high accuracy and high resolution imaging. Additionally, it is outfitted with an ultra-precise interferometric autofocus system which enables the stepper to precisely focus onto each individual layer at the same time. In addition to its standard features, SF 130 also incorporates a highly capable light source with a 4X3X3M resolution and a wide field of view for consistent light output. Additionally, it is able to provide various 180nm DUV options for ArF lithography, as well as I-line capability for advanced device packaging. Furthermore, the system has an outstanding 5 cycles/hour throughput and can run up to 200 dose levels in a single job. In summary, NIKON SF130 is a highly reliable and capable wafer stepper that is widely used in chip production, photomask production, and advanced device packaging. It offers a maximum scan field size of 5.9 inches, 25 mm distortion correction, 10 mm autofocus capability, a krypton ion laser, a 28.5kV power supply, 4X3X3M resolution, and a wide field of view. It is also capable of providing various 180nm DUV options and has an impressive 5 cycles/hour throughput.
There are no reviews yet