Used NIKON NSR SF130 #9191890 for sale
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ID: 9191890
Wafer Size: 8"
Vintage: 2005
i-Line stepper, 8"
Main computer:
System: DS10
Hard disk: DKA0, DKA100
Disk drive: CD ROM, Floppy disk
Illumination type: RET (Resolution enhancement technology)
Conv: σ = 0.7
2/3Wheel band: σ = 0.8
Small σ: σ = 0.4
1/2 Wheel band
IN σ: (SF100 Interchangeable, small σ)
Reticle microscope: Movable
Wafer alignment: FIA, LSA
Auto focus: Normal
Wafer loader: OF
Type 3 robot
Cassette
Control rack position: Right (Body and one body type)
Reticle loader: 6" Normal
PPD
Bar code reader
Control temperature
Chamber type
Unit version:
OPD: A1v1.50
Wafer loader: 62V5.20
Reticle loader: 20V2.00
Wafer stage: ST10PV1.40
Wafer alignment: 83V5.10
Reticle alignment: 83V5.10
Lens controller: 10V0507
PI
Power: 5.0 kW
Currently warehoused
2005 vintage.
NIKON NSR SF130 is a high-performance wafer stepper popular with the electronics industry. It features NSR-S301A scanner mirror with a ringfield type optics, enabling the machine to produce superior quality images with superior performance at a low cost. The NSR-S301A mirror is driven by Dual AXIS Stochastic Scanners, making the equipment highly efficient and highly responsive. The machine also has a high numerical aperture system, allowing more lenses to be used on the stepper without sacrificing imaging power. This unit produces superior 3D images and fine resolution. NIKON NSR-SF130 has an ultra-high-precision spindle, an ergonomic design, and an industry-leading user interface. The spindle has a 40-micron-wide nanofocus and can produce image resolution of 0.09 microns. With the machine's high-precision alignment technology, the user can easily and accurately adjust the position of the stepper and quickly change the exposure settings. The tool has an ergonomic design, with the latest modern technology to make sure the asset can withstand long working hours and stay reliable in harsh conditions. The user interface for NSR SF 130 is extremely user-friendly and intuitive. Hyper Smart Exposure (HSE) is a unique feature that makes it easy for the user to select the best exposure for their application. The stepper also features auto focus, which quickly finds the best positions for the focus field, and pulse phase modulation, allowing for faster exposure time and higher image quality. In addition, the model allows for image rotation, image compensation, and image bundling. Overall, NSR SF130 is an excellent wafer stepper that can produce superior 3D images and excellent resolution. It has an ergonomic design and an intuitive user interface, making it easy to use. With its high precision spindle, exposure time can be kept low while ensuring superior image quality. And with its auto focus and pulse phase modulation, the user has a great deal of control over their application. With all of these features, NIKON NSR SF 130 stands out as a great tool for any electronics industry.
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